The growth of gadolinia doped ceria films with controlled surface structure for optimum device performance often presents a significant technological problem for experimental investigation. In the present investigation, gadolinium doped ceria (GDC) thin films were prepared by pulsed laser deposition (PLD) and were studied for their surface structure evolution in relation to various growth parameters. The deposition was made with gadolinia concentrations 5, 10, 15, and 20 mol % to ceria pellets. The dependence of laser energy on 10 mol % GDC thin film was studied. The effect of substrate and substrate temperature on 20 mol % GDC thin film was also investigated. The base pressure was kept at 3.5x10-5 mbar during all the studies. The films were characterized using atomic force microscopy (AFM). The AFM results gave a consistent picture of the evolution of GDC film surface morphologies and microstructures in terms of growth behaviour, shape, and particle distribution.
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