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1 Machine Graphics and Vision

1 2001

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Complex approach to surface reconstruction of microscopic samples from bimodal image stereo data

Jan J., Janova D.

Machine Graphics and Vision

2001

Vol. 10, No. 3

261-288

The paper describes a set of approaches and mathods enabling robust and relatively precise stereo-analysis-based surface reconstruction in scanning electron microscopy(SEM). The paper primarily deals with the disparity analysis problem, namely with selection of a suitable similarity criterion to be used for finding image correspondences. The search-and-match method (as opposed to feature-based analysis) is shown as probablyn the only practical solution in the given environment of SEM when no prior constraints on the surface type are allowed. Extensive comparison of some common and newly suggested similarity criteria lead to the conclusion that the designed angle criterion is the only one acceptable so far with respect to the error rate. Use of the criterion has been shown equivalent to applying a non-linear two-dimensional matched filter, which enables efficient frequency domain implementation in the form of a linear matched filter modification. An important improvement in reliability of the computed disparities has been achieved by using both available imaging modalities (back-scattered electrons - BEI and secondary electrons - SEI), thus providing vector image data. Expressing the criterion for the vector case in terms of both individual scalar cases cuts computational requirements by half, besodes allowing for an additional reliability criterion - comaprison of three different, though partly, dependent criteria. Secondly, the comprehensive approach includes also solution of problems which may seem marginal but are important for the practical success of the analysis. Recent improvements, solving some of such specific problems of SEM stereo analysis, are discussed as well. The paper summarises the present state of the method's development over the past few years partial descriptions of which can be found scattered in previous publication devoted to individual specific problems.