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EN
The objective of this paper was to present an alternative technique of manufacturing the unit cells of spiral-shaped resonators (SR) on the aluminium nitride (AlN) ceramics. In this technique the AlN plane surface is irradiated by the Yb:glass medium-power laser (1.06 μm). As a result of the irradiation by a focused laser beam (a laser beam power up to 20 W), the rupture of the aluminium and nitrogen physical bonds occurs. Under such circumstances the conductive aluminium “paths” are formed on the originally insulating ceramic surface. Upon obtaining low ohmic conductive paths, this method makes for the feasible manufacturing of metamaterial structures. In carried out studies, the usage of such structures to suppress the coupling between pairs of patch antennas has been examined. The improvement of the mutual coupling at the level of 10 dB has been obtained. One of the advantages of the demonstrated method is a possibility to perform the selective and direct metallization of the AlN ceramics surface without using any mask as opposed to photolithography. It greatly reduces the implementation time of the projected metamaterial structures.
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