In this paper the basic acoustic elements models are developed on the base of the VHDL-AMS language. Constructed models are based on the thin plates theory and are intended to be used in computer-aided design at the schematic level of basic acoustic MEMS elements. The results of the models for basic acoustic elements of piezoelectric and electrostatic types investigation are also presented.
The article presents Verilog – AMS model of the comb-drive sensing element of the integrated capacitive microaccelerometer. The suggested model allows to simulate the reaction of the sensing element effected by the applied force of acceleration, changes of its comb-drive capacities, output voltages and currents for determining its constructive parameters and for analysis of the mechanical module of the integrated device at the behavioral level of computer-aided design.
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