Purpose: The main objective of the study was to determine the influence of selected parameters of inductively coupled plasma on the properties of drills nitrided using the given method. The task was to establish the correlation between certain parameters characterising the plasma discharge, measured using a Langmuir probe, and the key functional properties of the surface layer of the drills. For this purpose, two groups of experiments were planned. The first group examined the effect of varying nitrogen flow through the retort, ranging from 50 cm³/min to 200 cm³/min, with a generator power of 2 kW, frequency of 27.12 MHz, and nitriding time of 40 minutes. The second group of studies determined the effect of varying generator power, ranging from 0.5 kW to 4 kW, with a nitrogen flow rate of 150 cm³/min, frequency of 27.12 MHz, and nitriding time of 40 minutes. Design/methodology/approach: The study included recording selected parameters of inductively coupled plasma using a Langmuir probe during the nitriding process of drills. It was followed by a metallographic characterisation of the obtained surface layers in terms of their structure, hardness, and effective thickness. Findings: The study results showed that by characterising the discharge in inductively coupled plasma, it is possible to some extent to predict certain properties of nitrided layers, along with their potential suitability for developing optimal technological processes, particularly when implementing new applications. Research limitations/implications: Additional research could establish correlations between a larger number of plasma-characterising factors and the operational properties of nitrided layers. It would also contribute to a more comprehensive understanding of the physicochemical phenomena accompanying the described process. Practical implications: The research results indicate the possibility of utilising measurements of inductively coupled plasma parameters to optimise the nitriding process with ICP, focusing on the functional properties of the produced surface layers. Originality/value: The paper presents the use of the Langmuir probe for plasma characterisation in industrially promising ICP nitriding processes, along with their impact on the obtained properties of the hardened surface layer.
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