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Modeling of vibrating angular. Motion sensor in Matlab/SIMULINK

Nazdrowicz Jacek

International Journal of Microelectronics and Computer Science

2018

Vol. 9, nr 1

27--32

This paper presents different models and results of simulations of MEMS vibrating gyroscope in Matlab/SIMULINK environment. Each model is created with different approach, using different blocks and different physics. Therefore author presents his proposal of mathematical, electrical equivalent and physical models. Results obtained from these models can give some hints regarding design and dimensions of some crucial parts of MEMS gyroscope. Here, decoupled vibrating sensor is considered, which minimize drive and sense motion mutual influence.

Decoupled Mems vibrating gyroscope simulations based on finite element method

Nazdrowicz Jacek

International Journal of Microelectronics and Computer Science

2018

Vol. 9, nr 2

66--71

In this paper the analysis of a MEMS vibrating gyroscope model is presented. The FEM analysis of the 3D structure has been performed in COMSOL Multiphysics software. Author took particular attention on mechanical properties particular parts of this device especially combs (used in electrostatical actuators and sensors) in drive and sense directions. For further electrostatic analysis (which is not covered in this article) this analysis has enormous meaning because any deformation of comb structure during operation influences on quality of electrostatic actuating and sensing. In this paper author performed stress results and deformation analysis in sense direction, however similar conclusions one can be drawn for drive direction.