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1 Materials Science Poland

1 2009

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The influence of the prefiring temperature on the structure and surface morphology of sol-gel derived ZnO film

Hwang K. S., Hwangbo S., Kim J. T.

Materials Science Poland

2009

Vol. 27, No. 1

159--170

Show aC-axis oriented ZnO thin films were prepared on silica glass substrates by the sol-gel method using a zinc naphthenate precursor. As-deposited films were prefired at 250 °C for 60 min, at 350 °C for 30 min, and at 500 °C for 10 min, followed by final annealing at 600-900 °C in air. Crystal structure, surface morphology, surface roughness and transmittance at the visible range were analyzed by high resolution X-ray diffraction, field emission scanning electron microscopy, scanning probe microscopy, and ultraviolet spectrophotometry. (002)-oriented ZnO films were obtained by annealing at 600 °C, and at higher temperatures for the films prefired at 350 °C and 500 °C. All the films exhibited a high transmittance, above 80%, in the visible region, and showed a sharp fundamental absorption edge at 0.38-0.40 žm. The most highly c-axis oriented ZnO with a homogeneous surface was observed at a prefiring temperature of 350 °C.