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1 Zeszyty Naukowe Politechniki Rzeszowskiej. Budownictwo i Inżynieria Środowiska

1 2000

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Air distribution in clean rooms

Jelykh V., Jurkevich J.

Zeszyty Naukowe Politechniki Rzeszowskiej. Budownictwo i Inżynieria Środowiska

2000

z. 32[180], cz.2

145-149

Development of new technologies (microelectronics, computer technology, medicine etc.) demands availability of high-precision technological rooms, named "clean rooms". That is why, demands for keeping necessary microclimate and, as a result, maintenance of effective air exchange organization are constantly rising. In clean rooms there are three basic schemes of air exchange according to Federal Standart of the USA F209C depending on their purpose: 1 - with vertical air jets (from top to bottom); 2 - with horizontal (air supply from whole surface of ceiling or wall ); 3 - with vertical and horizontal air jets. Last one is the most spread for clean rooms with clean degree. Experimental investigations of air jets were carried out on the module of clean room 0,65x3,8x2,4(h)m as a basic unit of clean rooms creation with various volume and different purpose at presence and absence of the equipment. Air was supplied through filters of careful purification, mounted on the wall of equal air distribution pipe with directing blades. Air exhaust was realised through the side hole by width 0,6m and various height in the wall over the floor. Measurement of air jet's velocity was made by thermoelectrical anemometer TA-9 at its numbers 0-5m/s. For obtaining universal calculating equations the air jet's velocities have been expressed as sizeless. Air outlet velocity from incoming hole Vo and air jet's velocity epures in clean room module have been determined without any equipment and with it, taking into account different places of air exhaust devices; dependences of air jet's sizeless velocities have been obtained at the conditions described above; corrective coefficient, which takes into account different places of the equipment, has been determined; non-ventilated areas have been established at these conditions. Velocity of incoming air outlet Vo was determined under condition of minimum air velocity maintenance in service area of clean room module; obtained equations make possible to establish recommended places of the technological equipment situation at the initial input parameters.