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Problemy dynamiki strukturalnej mikroukładów

Uhl T.

Zeszyty Naukowe Politechniki Rzeszowskiej. Mechanika

2008

z. 74 [258]

433-440

The paper deals with some problems of micro-electromechanical system design and testing. Design process of mechanical parts of this micro-systems is discussed. The role of modeling and simulation study for design of micro - systems including structural dynamic problems is presented. Uncertainty of the MEMS structures are common in typical design due to technological manufacturing process which is very little controllable. The influence of system parameters uncertainty on dynamic features variability is discuss. Case study of micro-comb resonator is considered.