This paper presents the improved method of obtaining the stable hydrogenated amorphous silicon (a-Si:H) due to the protocrystalline nature of the Si:H materials. The latest experiments and results on silicon thin film solar cells are presented in this publication. The relation of microstructure and the efficiency of amorphous and microcrystalline silicon single photovoltaic structures as well as tandem on glass and triple on steel foil solar cell are also discussed.
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