Wyniki wyszukiwania - BazTech

Ograniczanie wyników

1 Metrology and Measurement Systems

1 2011

Znaleziono wyników: 1

Liczba wyników na stronie

Wyniki wyszukiwania

Wyszukiwano:
w słowach kluczowych: silicon single crystal

Sortuj według:

Ogranicz wyniki do:

Ultrasonic spectroscopy of silicon single crystal

Sedlak P., Tofel P., Sedlakova V., Majzner J., Sikula J., Hasse L.

Metrology and Measurement Systems

2011

Vol. 18, nr 4

621-630

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation. EUS is based on interaction of two signals: an electric AC signal and an ultrasonic signal, which are working on different frequencies. The ultrasonic wave affects the charge carriers' transport in the structures and the intermodulation electrical signal which is created due to the interaction between the ultrasonic wave and charge carriers, is proportional to the density of structural defects. RUS enables to measure natural frequencies of free elastic vibrations of a simply shaped specimen by scanning a selected frequency range including the appropriate resonances of the measured specimens.