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Development of the basic acoustic elements models on the base of the VHDL – AMS language for computer-aided design at the schemotechnical level

Teslyuk V., Holovatyy A., Alshawabkeh H. A.

ECONTECHMOD : An International Quarterly Journal on Economics of Technology and Modelling Processes

2018

Vol. 7, No 2

53--58

In this paper the basic acoustic elements models are developed on the base of the VHDL-AMS language. Constructed models are based on the thin plates theory and are intended to be used in computer-aided design at the schematic level of basic acoustic MEMS elements. The results of the models for basic acoustic elements of piezoelectric and electrostatic types investigation are also presented.