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A study of the gas specificity of porous silicon sensors for organic vapours

Choi S. H., Cheng H., Park S. H., Kim H. J., Kim Y. Y., Lee K. W.

Materials Science Poland

2009

Vol. 27, No. 2

603--610

A porous silicon sensor was investigated as a means to determine the response specificity for organic vapours. Porous silicon layers were fabricated by electrochemical anodization of p-type crystalline silicon in an HF ethanol solution under various conditions. The porous silicon sensors were placed in a gas chamber with various organic vapours, and the changes in electrical resistance under constant voltage of each sensor were used as detection signals. The sensors recorded various changes in resistivity for various organic vapours.