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The difference of the mechanism to yield either dense or hollow particles may be caused rather at the stage prior to decomposition in the sequential steps because any structural change is not possible except for stress-induced strain and crack once a solid is formed. The stage of solidification and drying of the droplets plays an important role to determine the structure of the final particles in SPM. In this paper, the drying behaviour of atomized droplets of zirconium oxychloride solution is discussed in comparison between the experimental result and theortical analysis. The drying behaviour of the droplets with contraction is simulated assuming uniform temperature and concentration in droplets and surface evaporation. The hollow particles more than [formula] are experimentally observed in the obtained particles for any conditions. Drying of the atomized droplets is predicted to complete in 20-50 msec from atomizing into the reactor by theoretical analysis and the drying rate is very large. Because of the large drying rate, the concentration distribution in the droplet is formed so that the shell on the droplet surface is formed. The shell on the droplet surface is often broken by the vapour pressure and/or thermal stress with a rise in temperature. Hence the hollow spheres and the small fragments are yielded.
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