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1 Journal of Telecommunications and Information Technology

1 2009

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Si-Based Electrodes for Potentiometric Measurements of Aqueous Solutions

Zaborowski M., Tomaszewski D., Jaroszewicz B., Grabiec P.

Journal of Telecommunications and Information Technology

2009

nr 4

71-75

Three sensors for chemical and physical examination of aqueous solutions were presented in the paper. An Au potentiometric electrode, an AgCl chlorine ion sensor and a p-n junction thermometer were developed. Their layout and internal structure were explained in the light of the manufacturing process. The device characteristics were measured in conditions corresponding to normal operation of the devices. Basic electrical parameters of the developed structures, as well as their sensitivity to environmental parameter variation were estimated.