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Simple modeling approach for line impedance of on-chip CMOS interconnects

Ymeri H., Nauwelaers B., Maex K.

Journal of Technical Physics

2004

Vol. 45, no 1

71-77

Simple and accurate closed-form model enabling to calculate frequency-dependent distributed inductance and associated distributed series resistance per-unit-length of single on-chip interconnects on a lossy silicon substrate is presented. The closed-form formulas for the frequency-dependent series impedance parameters are obtained using a closed-form integration method and the vector magnetic potential equation. The proposed frequency-dependent inductance -L(omega) and resistance R(omega) per-unit-length formulas are shown to be in good agreement with the electromagnetic solutions.