The paper presents an overview of experimental results of various plasma applications based on atmospheric and vacuum discharges. A multifunctional low-temperature ozone sterilizer with a ultrasonic cavitation and dielectric barrier discharge generated at atmospheric pressure as well as ozonators with a diaphragm for water treatment and disinfection of medical tools have been developed. Particular attention is paid to the investigation of arc, high-frequency and non-self maintained discharges generated in vacuum for coatings application. Some aspects of pulsed plasma treatment, surface modification and hardening due to nitriding, oxidation and carburization are discussed.
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