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Titanium dioxide (TiO2) films, composed mainly of anatase nanocrystallites, have been obtained from a low temperature poly(ethylene glycol) (PEG) modified sol-gel method. The maximum process temperature in this method is around 90 °C. An addition of PEG in the films accelerates the formation of anatase nanocrystallites. In order to better understand the nature of the influence of PEG on film crystallization, sol-gel solutions were prepared with PEG of different molecular weights (200, 400 and 600). The reference solution without PEG was also prepared. In addition, the influence of different PEG chain lengths on the films' phase transition from anatase to rutile was studied by means of Raman spectroscopy and XRD. Anatase was found to be stable up to 900?1000 °C, depending on the molecular weight of the PEG used in the films.
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