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Moving-aperture-based three-dimensional micro-measurement system

Fan S., Yu M., Jiang G., Wang Y., Wang W., Li W.

Optica Applicata

2018

Vol. 48, nr 4

533--547

To overcome the depth-of-field limitation of an optical microscope image, a three-dimensional measurement method with a superior depth-of-field is proposed. In the proposed method, light-field information of different angles is obtained by moving the aperture and the three-dimensional scene is reconstructed by using a computational reconstruction technology. First, stereo matching of different aperture position images is performed to obtain the multi-aperture imaging deviation. The focal plane moving distance is thereby estimated. Then, the relational expression between the image coordinates and the focal plane moving distance is determined according to the image coordinates. Two dimensional coordinates of the space point are obtained by the expression coefficients. Finally, the depth coordinates are computed, and three-dimensional reconstruction of the spatial points is completed. Experiments of three-dimensional measurements of the calibration board with different angles and circuit boards are conducted. The results show that the maximum error of the distance measurement is controlled into 0.84%, and the maximum angle measurement error is controlled into 4.56%.