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Modeling and simulations of MEMS gyroscope with MATLAB/SIMULINK package

Nazdrowicz J.

International Journal of Microelectronics and Computer Science

2017

Vol. 8, nr 1

21--28

This paper presents developed mathematical model of MEMS gyroscope created in Matlab/SIMULINK environment. The model can be very useful for calculating MEMS gyroscope geometrical parameters. These parameters play very significant role, because they have huge and direct impact on device response, performance and further possibilities of application. Results of simulations are presented in this article separately for drive and sense direction. In addition there are also results in frequency domain presented. With all these results we obtain quick overview of behavior this kind of MEMS device and response characteristics.