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1 International Journal of Microelectronics and Computer Science

1 2014

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Inﬂuence of substrate meshing on the accuracy of EPFL substrate model for smart power ICs

Stefanucci C, Buccella P, Kayal M., Sallese J.M.

International Journal of Microelectronics and Computer Science

2014

Vol. 5, nr 2

61--68

Minority carriers diffusion in Smart Power ICs substrate can be simulated in standard spice-like software using the EPFL Substrate Model. This model is based on a parasitic substrate network extracted from the integrated circuit layout following a given meshing strategy. In this work Design of Experiments (DOE) techniques are used to run a limited number of simulations to evaluate the inﬂuence of the meshing strategy on the accuracy of the model when compared to Technology Computer Aided Design (TCAD) simulations. A parasitic lateral BJT will be analyzed as two-dimensional case study with both spice-like and ﬁnite element simulations for the minority carriers diffusion. Using statistical analysis a linear model is developed to discover the main geometrical domains inﬂuencing the accuracy of the studied model.