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Microresonator : Mathematical Model

Sviridova T., Lobur M.

Machine Dynamics Problems

2007

Vol. 31, No. 3

87-91

MEMS design flow should take in account every measure to include key steps involving in designing of MEMS device, but there are many variables which cannot be taken in account. Thus in this paper authors presented mathematical model of electrostatic microresonator in which mechanical and electrical parameters are used. Such model could be used during statistical analysis of electrical and mechanical parameters to obtain correlation dependences between them. This analysis allows to predict, to estimate output characterristics of the structure. In the paper main aspects of micro-electro-mechanical actuators design are presented. Equations for mechanical and electrical model are carried out.