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2 International Journal of Microelectronics and Computer Science

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Modeling of vibrating angular. Motion sensor in Matlab/SIMULINK

Nazdrowicz Jacek

International Journal of Microelectronics and Computer Science

2018

Vol. 9, nr 1

27--32

This paper presents different models and results of simulations of MEMS vibrating gyroscope in Matlab/SIMULINK environment. Each model is created with different approach, using different blocks and different physics. Therefore author presents his proposal of mathematical, electrical equivalent and physical models. Results obtained from these models can give some hints regarding design and dimensions of some crucial parts of MEMS gyroscope. Here, decoupled vibrating sensor is considered, which minimize drive and sense motion mutual influence.

MEMS accelerometer simulations in Matlab/SIMULINK and COMSOL Multiphysics

Nazdrowicz J.

International Journal of Microelectronics and Computer Science

2017

Vol. 8, nr 4

161--167

In this paper modelling and simulation of MEMS accelerometers in Matlab/SIMULINK environment are presented. Results of simulations of three different approaches: mathematical, electrical equivalent and physical models are compared with FEM accelerometer model created in COMSOL software. Results of simulations are analyzed for displacement response for two of the most popular spring geometries - folded and straight. Author takes into consideration crucial aspects of damping coefficients influence on accelerometer performance.