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1 Materials Science Poland

1 2018

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Gas composition inﬂuence on the properties of boron-doped diamond ﬁlms deposited on the fused silica

Dec B., Ficek M., Rycewicz M., Macewicz Ł., Gnyba M., Sawczak M., Sobaszek M., Bogdanowicz R.

Materials Science Poland

2018

Vol. 36, No. 2

288--296

The main subject of this study are molecular structures and optical properties of boron-doped diamond films with [B]/[C]ppm ratio between 1000 and 10 000, fabricated in two molar ratios of CH4–H2 mixture (1 % and 4 %). Boron-doped diamond (BDD) film on the fused silica was presented as a conductive coating for optical and electronic purposes. The scanning electron microscopy images showed homogenous and polycrystalline surface morphology. The Raman spectroscopy confirmed the growth of sp3 diamond phase and sp2 carbon phase, both regular and amorphous, on the grain boundaries, as well as the efficiency of boron doping. The sp3/sp2 ratio was calculated using the Raman spectra deconvolution method. A high refractive index (in a range of 2.0 to 2.4 at λ = 550 nm) was achieved for BDD films deposited at 700 °C. The values of extinction coefficient were below 1.4 at λ = 550 nm, indicating low absorption of the film.