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1
Content available remote The microfactory in Japanese national R&D project
EN
We have been developing an experimental microfactory system in R&D project of Industrial Science and Technology Frontier (/.OF) of M1TI. The aims of this project are to investigate technological possibility of "microfactory" and to make clear the problems to be solved in realizing it. The microfactory system consists of three units; processing, assembling and conveyance unit, in the same way as present manufacturing system. The system will be about the size of a desktop and can handle small parts several grams in weight. Two different ways to reduce the size of the system have been pursued and the system will be achieved in 2000.
2
Content available remote Multiple distributed micromachine system
EN
Using micromachine technology, we have developed the second prototype of a mul-nple distributed micromachine system. The developed micromachine is the world's smallest machine (width: 9 mm, length: 5 mm, height: 6.5 mm, weight: 0.52 g) that can travel in both the horizontal and vertical directions. This paper gives an overview of the prototype and its travel and connection/disconnection performance. The following conclusions were obtained: (1) The developed micromachine is able to travel freely on a horizontal plane. (2) Ten connected micromachines can move vertically around a small tube. (3) Automatic connection and disconnection are realized by newly developed microconnectors.
3
Content available remote Modelling simulation and design of micromechanical devices in ITE
EN
R&D activity of the ITE Sensors Department is presented. Several types of the piezoresistive-type pressure sensors are already produced in the small scale and offered to the customers on the local market. Silicon structures' designs, housings and technology are still optimized to improve functional parameters of the devices. Other sensors are under research. Technological experiments and production are realized in cooperation with the ITE Technological Department. PSFET (Pressure Sensitive Field Effect Transistor) and DPR (Dew Point Detector) are both developed in cooperation with the Warsaw University of Technology. Capacitive and piezoresistive type acceleration sensors are the subject of the ITE individual research program, sponsored from the government founds. ISE (Ion Selective Electrodes) and m-TAS (Micro Total Analysis System) are the newly opened programs in the chemical sensor area.
4
Content available remote In-pipe wireless inspection micromachine
EN
We have been developing an In-Pipe Inspection Micromachine for inspection on the inner surface of thennoconduction tubes of power plants, in the Collaboration with DENSO, Toshiba and SANYO under the project. The machine consists of several devices, CCD camera for inspection, actuator for locomotion, communication circuit for control, microwave antenna and photovoltaic device for energy supply and communication, and so forth. Through the project, the technologies of the component devices and the system have been developed. Several prominent results were also obtained on the both technologies. As for the device technologies, the component devices have been miniaturized and integrated. As for the systematization technologies, the functions, simulation, packaging and assembling of the system have been studied.
5
Content available remote Future prospects of micromachines
EN
Micromachine is expected to be a Japanese industrial base in the 21 st. century. The reason is it would create a new technological paradigm, which presents solutions to current human problems and, at the same time, presents fresh opportunities for a new human life and also new industries.
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