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Integrated instruments for total chemical analysis

Dziuban J.

Materiały Elektroniczne

2001

T. 29, nr 1-2

70-71

Previous works on silicon micromachined devices started in the Institute of Microsystems Technology (ITM) of the Wroclaw University of TEchnology (WUT) in late 80's, although some fundamental technological works on silicon anisotropic etching for three-dimensional structures fabrication were done in mid 70's. Our Institute was the first in Poland recognising a need of micromachined sensors and actuators investigations. In the lecture some of the most interesting past works will be shown. Newly developed components for analytical chemistry and microchemistry will be presented. a short sketch of recently discovered fast deep anistropic etching of single silicon wafers and other materials will be presented. Samples of devices and short TV movie on our works will be shown.