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1 Opto-Electronics Review

1 2001

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Free-space micro-optical modules: the missing link for photonic interconnects to sillicon chips

Thienpont H., Baukens V., Volckaerts B., Ottevaere H., Debaes C., Vervaeke M., Tuteleers P., Vynck P., Hermanne A., Hanney M., Brunfaut M., Van Campenhout J. M., Veretennicoff I.

Opto-Electronics Review

2001

Vol. 9, No. 3

238-247

We report on design, fabrication, characterisation, and demonstration of scalable multi-channel free-space intercinection components with the potential for Tb/s cm² aggregate bit rate capacity over inter-chip interconnection distances. The demonstraton components are fabricated in a high quality optical plastic, PMMA, using an ion-based rapid prototyping technology that we call deep proton lithography. With the presently achieved Gigabit/s data rates for each of the individual 16channels with a BER smaller than 10⁻¹³ and with inter-channel cross-talk lower than -22 dB the module aims at optically interconnecting 2D opto-electronic VCSEL and receiver arrays, flip-chip mounted on CMOS circuitry. Furthermore, using ray-tracing software and radiometric simulation tools, we perform a sensitivity analysis for misalignment and fibrication errors on these plastic micro-optical modules and we study industrial fabrication and material issues related to the mass-replication of these components through injecton-molding techniques. Finally, we provide evidence that these components can be mass-fabricated in dedicated, highly-advanced optical plastics at low cost and with the required precision.