Demands for micro/nano products and assembly systems have been raised significantly to meet the ever complex technical needs for modern society. In this paper, we share the experiences and results of the study on the flexible micro assembly workcell focused primarily on a novel system implementation and system performance analysis. For flexible and autonomous assembly operations, we investigated a novel model based 3D depth measurement technology for faster and cost effective means to promote autonomous micro assembly systems in various industries. Micro parts, by its nature, are known of their shapes in advance for the majority of micro applications. We take advantage of the previously known shape of micro parts and hence apply a model based approach for a faster and cost effective localization and 3D depth measure of randomly loaded micro-parts on the workcell. The proposed 3D depth measuring method is based on the pattern recognition and multi-focus technique enabling it to extract only information useful for micro parts assembly for faster recognition. For demonstration purpose, silicon based oxide gears are fabricated by bulk micromachining and are used to study performance indices and to prove the usefulness of the proposed micro 3D depth measurement technology.
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