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1 Polish Journal of Applied Chemistry

1 2005

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Cylindric electromagnetron electrode for continuously variable PVD/CVD mixed processing

Olcaytug F., Szymanowski H., Kaczmarek M., Sobczyk A., Rapiejko C., Schalko J., Piplits K., Gazicki-Lipman M., Yasuda H.

Polish Journal of Applied Chemistry

2005

Vol. 49, nr 1-2

11-21

A construction of a cylindrical electromagnetron electrode, designed for its use in combined PVD/CVD processing, is presented. It consists of seven sections, forming a sequence of seven separate electromagnets, oriented in a NS-SN-NS-SN-NS-SN-NS configuration. The electrode has been tested in both RF and AF deposition systems. RF sputtering of aluminium from this electrode, and RF PECVD of Ge/C films using a pair of cylindrical electrodes, have been demonstrated in two different experimental set-ups. In the AF deposition system, an application of a pair of electromagnetron electrodes has been shown to allow one to perform simultaneous combination of PECVD of carbon film and sputtering of aluminium, resulting in a possibility to deposit films of gradient concentrations of carbon and aluminium.