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Hybrid sol-gel-glaze planar optical waveguides on LTCC substrate - preliminary works

Tadaszak R. J., Łukowiak A., Golonka L. J., Patela S.

Optica Applicata

2011

Vol. 41, nr 2

493--500

Preliminary works on optical planar waveguides made from two different materials on LTCC (low temperature cofired ceramic) substrates have been presented. Sol-gel-derived silica and glaze layers were used to prepare the waveguide structure. This kind of component can be used in integrated optoelectronics devices, which implicates a higher scale of integration and reliability. Furthermore, thanks to this method, it is possible to connect passive components made in thick-film technology with planar optical waveguides on one substrate. Described structures can be used in many devices. The most interesting is their application in sensors with optical detection, telecommunication elements, e.g. optical switches or devices called "lab-on-chip". The main aim of the research was to develop a new method of producing optical planar waveguides. Choosing the best materials for both types of layers was made in the first part of the investigation. Very important is the compatibility of the materials and the interaction with LTCC substrate, especially during firing. This kind of test was made. The paper presents the results of experiments for choosing the best type of glaze from four low temperatures, and transparent types of them. Verification of interactions between a silica layer and a glaze determines the best process parameters. Optimization of a waveguide size and shape is described as well.