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Miniature plasma generator made of low temperature co-fired ceramics (LTCC) for gas characterization using optical emission spectroscopy (OES)

Malecha K., Roguszczak H., Patela S., Golonka L.J.

Przegląd Elektrotechniczny

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2014

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R. 90, nr 9

69-72

EN

A novel miniature plasma generator made of low temperature co-fired ceramics (LTCC) is presented in this paper. The developed generator is composed of a stack of 9 ceramic tapes, has an optical fibre integrated into the structure and is consisted of an 8.7 x 3.5 mm2 plasma chamber placed between two 5 x 5 mm2 electrodes made of AgPd. Each electrode is separated from the plasma chamber by a single LTCC tape, forming a 660 μm thick gap. The shape of the plasma chamber and the channel for the optical fibre were cut in green LTCC tapes using an UV laser, and the electrodes were fabricated with the standard screen-print method. During the experiments, the plasma chamber was filled with an ambient air. The plasma was generated between AgPd electrodes connected to an AC power supply. The light of the air plasma was transmitted from the plasma chamber to the miniature spectrometer using the integrated optical fibre. The glow discharge in the air at atmospheric pressure was characterized by optical emission spectroscopy (OES).

PL

W artykule przedstawiono technologię miniaturowego generatora plazmy. Wspomniany układ został wykonany za pomocą techniki bazującej na niskotemperaturowej współwypalanej ceramice LTCC (Low Temperature Co-fired Ceramics). Urządzenie składało się z 9 warstw ceramiki LTCC. W skład opracowanego generatora wchodziły komora plazmowa o wymiarach 8,7 x 3,5 mm2 oraz dołączony do niej światłowód kwarcowy. Komora plazmowa umieszczona była pomiędzy dwiema elektrodami o wymiarach 5 x 5 mm2 wykonanymi ze stopu PdAg. Każda z elektrod została odizolowana od komory plazmowej za pomocą pojedynczej warstwy LTCC tworząc szczelinę o grubości 660 μm. Kształt komory plazmowej oraz kanału pod światłowód zostały wycięte w surowych foliach ceramicznych za pomocą lasera UV. Elektrody PdAg zostały naniesione na ceramikę LTCC metodą sitodruku. Podczas eksperymentów komora plazmowa wypełniona była powietrzem z otoczenia o ciśnieniu atmosferycznym. Plazma powietrza generowana była pomiędzy dwiema izolowanymi elektrodami zasilanymi napięciem zmiennym. Promieniowanie optyczne plazmy powietrza było transmitowane z komory plazmowej do miniaturowego spektrometru za pomocą zintegrowanego światłowodu. Obserwowane wyładowanie jarzeniowe w powietrzu analizowano metodą optycznej spektroskopii emisyjnej (OES).

2

Mikroreaktor chemiczny z detekcją optyczną wykonany techniką LTCC (low temperature co-fired ceramics)

Malecha K.

Przegląd Elektrotechniczny

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2013

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R. 89, nr 10

108-111

PL

W artykule opisano technologię oraz właściwości mikroreaktora chemicznego ze zintegrowanymi elementami optoelektronicznymi. Opracowane urządzenie wykonano w technologii LTCC (Low Temperature Co-fired Ceramics – niskotemperaturowa ceramika współwypalana). Zastosowana technologia mikroelektroniczna umożliwiła integrację elementów mikrofluidycznych (kanały, komory itp.) oraz optoelektronicznych (dioda elektroluminescencyjna, czujnik światła) w jednym wielowarstwowym module ceramicznym. Prezentowany mikroreaktor przeznaczony jest do oznaczania substancji (bio)chemicznych w ciekłych próbkach o bardzo małych objętościach. Detekcja wspomnianych substancji odbywa się na zasadzie pomiaru absorbancji optycznej. Wstępne testy urządzenia przeprowadzono dla kilku roztworów wzorcowych nadmanganianu potasu. Na podstawie otrzymanych wyników stwierdzono dużą amplitudę sygnału wyjściowego oraz liniową odpowiedź urządzenia dla całego zakresu pomiarowego.

EN

The paper presents the technology and performance of the chemical microreactor with integrated optoelectronic components. The device was made using LTCC (Low Temperature Co-fired Ceramics) technology. The applied technology has enabled the integration of electronic, optoelectronic (passives, light emitting diode, light-to-voltage transducer) and microfluidic (channels, chambers, etc.) components in a single multilayer ceramic module. Microreactor with optical detection is designed for the determination of a (bio)chemicals substance in the micro- or nanoliter volume range. Detection of these substances is perforemed by measuring the optical absorbance. Preliminary studies were carried out for a test solutions of potassium permanganate. The obtained results showed a high level of output signal, linear response and good repeatability.

3

Optical pH detector based on LTCC and sol-gel technologies

Tadaszak R. J., Łukowiak A., Golonka L. J.

Materials Science Poland

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2013

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Vol. 31, No. 1

115-121

EN

Institute of Low Temperature and Structure Research, Polish Academy of Sciences, Okolna 2, 50-422 Wrocław, Poland This paper presents an investigation on using sol-gel thin film as a material for sensors application in LTCC (Low Temperature Co-fired Ceramics) technology. This material gives the opportunity to make new, low-cost highly integrated optoelectronic devices. Sensors with optical detection are a significant part of these applications. They can be used for quick and safe diagnostics of some parameters. Authors present a pH detector with the optical detection system made of the LTCC material. The main part of the device is a flow channel with the chamber and sol-gel active material. The silica sol-gel with bromocresol green indicator was used. As the absorbance of sol-gel layer changes with the pH value of a measured medium, the transmitted light power was measured. The pH detector was integrated with the electronic components on the LTCC substrate.

4

The low temperature co-fired ceramics (LTCC) chip for polymerase chain reaction (PCR) application

Bembnowicz P., Herbut P., Małodobra M., Karpiewska A., Golonka L. J., Jonkisz A., Dobosz T.

Optica Applicata

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2011

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Vol. 41, nr 2

471--480

EN

The DNA (deoxyribonucleic acid) amplification chip made of DP951 (from DuPont) ceramics consists of a microchamber, internal and external metallization. The external metallization is used for attachment of SMD (surface mount device) electronics elements. The internal metal layer improves thermal conditions inside the chamber. The temperature distribution in the chamber is verified by numerical simulation. Heating is realized by an external SMD resistor. The temperature measurements are made by attached Pt100 component. The temperature control is realized by a microcontroller based electronic system. Settings and visualization of the polymerase chain reaction (PCR) process parameters are actualized by dedicated PC (personal computer) software. The system is successfully tested. The DNA amplification inside the low temperature co-fired ceramics (LTCC) chip is achieved.

5

Low temperature co-fired ceramics (LTCC) microsystems

Golonka L., Bembnowicz P., Jurkow D., Malecha K., Roguszczak R., Tadaszak R.

Optica Applicata

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2011

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Vol. 41, nr 2

383--388

EN

The paper presents general information on ceramic microsystems. Low temperature co-fired ceramics (LTCC) technology is described in detail. Research and development on the LTCC sensors and microsystems carried out at Wrocław University of Technology (Poland) are presented. Microfluidic system, polymerase chain reaction (PCR) microreactor, acceleration sensor and sol-gel fiber optics for ceramic microsystems are described.

6

High temperature LTCC package for SiC-based gas sensor

Nowak D., Kulczak D., Januszkiewicz M., Dziedzic A.

Optica Applicata

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2009

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Vol. 39, nr 4

701-704

EN

A rapid progress in the development of semiconductor microelectronics is still observed. Miniaturization process of electronic devices is closely connected to packaging issues. In many cases package is as important as the device itself. Low temperature co-fired ceramics (LTCC) and thick-film technologies have the potential of incorporating multilayer structures and permit fabrication of special packaging systems. LTCC technology allows us to connect simply electrical or optical signals and to integrate passive components, heaters, sensors, converters, etc. In this paper, an LTCC package for SiC-based hydrogen gas sensor is presented. Some simulations of thermal properties were carried out and package structures were made and investigated. The package protects the sensor against mechanical damage and makes an easy connection of electrical signals possible. Moreover, the heater and temperature sensors allow proper temperature of an element to be obtained. Basic electrical parameters of an integrated heater as well as measured temperature distribution are presented.