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Measurement method of shape deviation of cylindrical micro-lenses using focused laser beam and reference axis

Woźniak A., Kretkowski M., Jabłoński R.

Metrology and Measurement Systems

2007

Vol. 14, nr 3

351-360

Constant progress in application of micro-lenses in many modern optical systems caused a continuous increase of the need to investigate methods of their measurement. A new method of measurement of shape deviation of such cylindrical micro-lens has been proposed. The concept is based on measurements of the distance between a reference and the lens surface in various directions. The reference points are established by the rotation axis of a precise rotary table. Detection of the surface of the measured object has been done using a focused laser beam moved by a high-resolution piezotranslator. In the paper we will show the results from our first measurements and we will discuss the advantages and disadvantages of our method as well as the method’s accuracy.