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Contactless method for resistance measurement of ultra-thin printed and conductive lines

Szybiński Krzysztof

Metrology and Measurement Systems

2020

Vol. 27, nr 3

427--439

In this paper the problem of resistance measurement of ultrathin conductive lines on dielectric substrates dedicated for printing electronic industry is discussed. The measured line is transformed in a non-invasive way into a resonance circuit. By using a magnetic coupling between the source line and the tested line, the resistance measurement can be performed non-invasively, i.e. without a mechanical contact. The proposed contactless resistance measurement method is based on the resonance quality factor estimation and it is an example of the inverse problem in metrology.