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Emerging technologies for deposition of high adhesive Ti-based coatings at room temperature

Lackner J.M., Waldhauser W., Berghauser R., Major B., Major R., Major Ł.

Advances in Materials Science

2007

Vol. 7, nr 3(13)

37-49

Titanium-based compounds are widely spread coating materials for tribological and bio-medical applications due to their exceptionally physical and chemical properties. Recently, the trend of using temperature-sensitive materials like polymers demands new low-temperature coating techniques for protective surface finishing as well as for functionalization of the surfaces. However, till now there is a lack of industrially-scaled low-temperature vacuum coating techniques (<50 °C). This work presents the up-scaling of pulsed laser deposition (PLD) and unbalanced magnetron sputtering with au optional ion beam pretreatment step using an anode layer source to industrial-scaled processes as well as the characterization of the most decisive film properties (adhesion, structure,...) of the deposited Ti-based films on steel and polymer substrates.