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On changing the properties of a multilayer structure by preliminary processing of a substrate

Pankratov Evgeny L.

Computer Methods in Materials Science

2022

Vol. 22, No. 2

89--100

In this paper, the effect of the preliminary processing of a substrate on the properties of a grown heterostructure is investigated. It is shown that the growth of an epitaxial layer on a buffer layer after preliminary annealing (before the growth) makes it possible to decrease the value of mismatch-induced stress. An analytical approach has been introduced for the analysis of mass and heat transfer in a multilayer structure accounting for mismatch-induced stress.