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Capacitive sensing in process instrumentation

Fuchs A., Zangl H., Moser M. J., Bretterklieber T.

Metrology and Measurement Systems

2009

Vol. 16, nr 4

557-568

This paper addresses the use of capacitive measurement principles for process instrumentation. A brief review on capacitance-based sensors to measure industrial process parameters is provided. A capacitance-to-digital conversion system developed at the Sensors Group at our Institute is presented. Applications of capacitance-based process instrumentation for moisture sensing, flow velocity determination, fill level measurement and proximity sensing are discussed in detail.