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EN
Low-temperature plasma production is possible as a result of photoionization using high-intensity extreme ultraviolet (EUV) and soft X-ray (SXR) pulses. Plasma of this type is also present in outer space, e.g., aurora borealis. It also occurs when high-velocity objects enter the atmosphere, during which period high temperatures can be produced locally by friction. Low-temperature plasma is also formed in an ambient gas surrounding the hot laser-produced plasma (LPP). In this work, a special system has been prepared for investigation of this type of plasma. The LPP was created inside a chamber fi lled with a gas under a low pressure, of the order of 1–50 mbar, by a laser pulse (3–9 J, 1–8 ns) focused onto a gas puff target. In such a case, the SXR/EUV radiation emitted from the LPP was partially absorbed in the low-density gas. In this case, high- and low-temperature plasmas (Te ~100 eV and ~1 eV, respectively) were created locally in the chamber. Investigation of the EUV-induced plasmas was performed mainly using spectral methods in ultraviolet/visible (UV/VIS) light. The measurements were performed using an echelle spectrometer, and additionally, spatial–temporal measurements were performed using an optical streak camera. Spectral analysis was supported by the PGOPHER numerical code.
PL
W artykule zawarto podstawy fizyczne i przegląd elementów optycznych do pracy w zakresie obejmującym ultrafiolet próżniowy (eUV) oraz miękkie promieniowanie rentgenowskie (SXr). Pierwszy rozdział obejmuje wprowadzenie do analizowanej tematyki i podstawy fizyczne. W drugim rozdziale przedstawione zostały podstawy działania optyki związanej z zakresem eUV/SXr wraz z wyróżnieniem jej wad oraz zalet. W trzecim rozdziale szczegółowo omówiono elementy optyczne, takie jak: filtry optyczne, zwierciadła (m.in. wielowarstwowe), siatki dyfrakcyjne, płytki strefowe Fresnela oraz rozwiązania hybrydowe. rozdział czwarty przedstawia szeroki obszar zastosowań optyki eUV/SXr. W ostatnim rozdziale znajduje się podsumowanie przedstawionych wcześniej informacji.
EN
The article presents the physical basis and overview of optical elements for the range including extreme ultraviolet (eUV) and soft X-ray (SXr). The first chapter contains an introduction to the subject under review and physical fundamentals. The second chapter presents the basics of optics for the eUV/SXr range, along with highlighting its advantages and disadvantages. The third chapter discusses in detail optical components such as optical filters, mirrors (including multilayers), diffraction gratings, Fresnel zone plates, and hybrid solutions. The fourth chapter presents a wide range of applications of eUV/SXr optics. The final chapter summarises the information presented earlier.
EN
In this work a review of investigations concerning interaction of intense extreme ultraviolet (EUV) and soft X-ray (SXR) pulses with matter is presented. The investigations were performed using laser-produced plasma (LPP) EUV/SXR sources based on a double stream gas puff target. The sources are equipped with dedicated collectors allowing for efficient focusing of the EUV/SXR radiation pulses. Intense radiation in a wide spectral range, as well as a quasi-monochromatic radiation can be produced. In the paper different kinds of LPP EUV/SXR sources developed in the Institute of Optoelectronics, Military University of Technology are described. Radiation intensities delivered by the sources are sufficient for different kinds of interaction experiments including EUV/SXR induced ablation, surface treatment, EUV fluorescence or photoionized plasma creation. A brief review of the main results concerning this kind of experiments performed by author of the paper are presented. However, since the LPP sources cannot compete with large scale X-ray sources like synchrotrons, free electron lasers or high energy density plasma sources, it was indicated that some investigations not requiring extreme irradiation parameters can be performed using the small scale installations. Some results, especially concerning low temperature photoionized plasmas are very unique and could be hardly obtained using the large facilities.
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