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Improvement of the electron beam lithography contact pads fabrication process

Indykiewicz K., Paszkiewicz R., Paszkiewicz B.

Optica Applicata

2016

Vol. 46, nr 2

249--254

In the paper, the verification of using the electron beam lithography technique as a main lithography tool for device fabrication is presented. The results of conducted experiments allow us to minimize the exposition time of big areas and retain acceptable metallic structures resolution and designed distances for structures in the neighborhood of a few micrometers. Conducted statistical analysis allows us to define the significance of the selected factors influence on the objectives of this study.