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Accurate interference pattern analysis module of automatic measurement system

Whang A. J., Chung C.-K.

Optica Applicata

2003

Vol. 33, nr 4

627-634

Profile measurement of surfaces is of vital importance in today’s industries, such as lens, wafer fabrication, microstructure. The phase-shifting interferometry (PSI) is very useful in optical measurement. The PSI has many advantages including noncontact measurement, high accuracy and high-speed of measurement. However, most of the PSI measurements are only suitable for certain measurement function and must match the specific algorithms. Therefore we can not integrate the system effectively. In this paper, we choose an interference fringe analysis program, named Intelliwave that can support an automation measurement system. The system can also be integrated with interferometers for different application mechanics, including Michelson, moiré, ESPI, Twyman–Green, Fizeau and shearing interferometers.