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1 Bulletin of the Polish Academy of Sciences. Technical Sciences

1 2018

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Electron optics column for a new MEMS-type transmission electron microscope

Krysztof M., Grzebyk T., Górecka-Drzazga A., Adamski K., Dziuban J.

Bulletin of the Polish Academy of Sciences. Technical Sciences

2018

Vol. 66, nr 2

133--137

The concept of a miniature transmission electron microscope (TEM) on chip is presented. This idea assumes manufacturing of a silicon-glass multilayer device that contains a miniature electron gun, an electron optics column integrated with a high vacuum micropump, and a sample microchamber with a detector. In this article the field emission cathode, utilizing carbon nanotubes (CNT), and an electron optics column with Einzel lens, made of silicon, are both presented. The elements are assembled with the use of a 3D printed polymer holder and tested in a vacuum chamber. Effective emission and focusing of the electron beam have been achieved. This is the first of many elements of the miniature MEMS (Micro-Electro-Mechanical System) transmission electron microscope that must be tested before the whole working system can be manufactured.