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2 Materials Science Poland

2 2015

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Temperature dependence of stress in CVD diamond films studied by Raman spectroscopy

Dychalska A., Fabisiak K., Paprocki K., Dudkowiak A., Szybowicz M.

Materials Science Poland

2015

Vol. 33, No. 3

620--626

Evolution of residual stress and its components with increasing temperature in chemical vapor deposited (CVD) diamond films has a crucial impact on their high temperature applications. In this work we investigated temperature dependence of stress in CVD diamond film deposited on Si(100) substrate in the temperature range of 30 degrees C to 480 degrees C by Raman mapping measurement. Raman shift of the characteristic diamond band peaked at 1332 cm(-1) was studied to evaluate the residual stress distribution at the diamond surface. A new approach was applied to calculate thermal stress evolution with increasing temperature by using two commonly known equations. Comparison of the results obtained from the two methods was presented. The intrinsic stress component was calculated from the difference between average values of residual and thermal stress and then its temperature dependence was discussed.

Study of CVD diamond layers with amorphous carbon admixture by Raman scattering spectroscopy

Dychalska A., Popielarski P., Franków W., Fabisiak K., Paprocki K., Szybowicz M.

Materials Science Poland

2015

Vol. 33, No. 4

799--805

Raman spectroscopy is a most often used standard technique for characterization of different carbon materials. In this work we present the Raman spectra of polycrystalline diamond layers of different quality, synthesized by Hot Filament Chemical Vapor Deposition method (HF CVD). We show how to use Raman spectroscopy for the analysis of the Raman bands to determine the structure of diamond films as well as the structure of amorphous carbon admixture. Raman spectroscopy has become an important technique for the analysis of CVD diamond films. The first-order diamond Raman peak at ca. 1332 cm−1 is an unambiguous evidence for the presence of diamond phase in the deposited layer. However, the existence of non-diamond carbon components in a CVD diamond layer produces several overlapping peaks in the same wavenumber region as the first order diamond peak. The intensities, wavenumber, full width at half maximum (FWHM) of these bands are dependent on quality of diamond layer which is dependent on the deposition conditions. The aim of the present work is to relate the features of diamond Raman spectra to the features of Raman spectra of non-diamond phase admixture and occurrence of other carbon structures in the obtained diamond thin films.