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1 Journal of Achievements in Materials and Manufacturing Engineering

1 2007

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Liquid phase deposition methods monitoring techniques influence for solid substrates and thin metal oxide films properties

Valiulis A. V., Silickas P.

Journal of Achievements in Materials and Manufacturing Engineering

2007

Vol. 24, nr 1

188-192

Purpose: Liquid phase deposition (LPD) method is a useful method to create thin oxide films from aqueous solutions under ambient conditions. Deposition of ceramic layers on polymers is a technological challenge because of polymer sensitivity to chemicals and high temperature processing. Design/methodology/approach: The work attempts to elucidate the role of the substrate during LPD of TiO2 films by using Kapton with different types of surface treatments. Findings: Was found that small differences in pH, temperature, and solution composition can lead to dramatic differences in the film's crystallinity, adherence, and growth rate. Thin films are very smooth, uniform with small amount of cracks. Research limitations/implications: Independent of technique and substrate, film thicker than a few hundred nm exhibited cracks, attributed to stresses that result during drying of the film. Originality/value: Techniques for monitoring the surface chemistry of the solid substrate and the deposited ceramic film have been developed.