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1 Journal of Achievements in Materials and Manufacturing Engineering

1 2009

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Optical properties and morphology of PECVD deposited titanium dioxide films

Kowalski J., Sobczyk-Guzenda A., Szymanowski H., Gazicki-Lipman M.

Journal of Achievements in Materials and Manufacturing Engineering

2009

Vol. 37, nr 2

298-303

Purpose: The purpose of the present work is to compare the structure and optical properties, with respect to their potential optical applications, of titanium dioxide films synthesized with the PECVD method from two different precursor materials, namely titanium tetrachloride and titanium tetraethoxide (TEOT). Design/methodology/approach: Optical properties as well as thickness of the films were analyzed by means of Variable Angle Spectroscopic Ellipsometry (VASE). Morphology studies were carried out by Scanning Electron Microscopy (SEM) and chemical composition characterisation was performed with the help of Energy Dispersive Spectroscopy (EDS) unit coupled with the electron microscope. Findings: Optical parameters approaching those of titanium dioxide were achieved for both precursors. Studies of morphology show that the films produced from TEOT have favourable, smooth surface in contradiction to broccoli-like structure obtained for the chloride precursor. The type of substance used for titanium oxides synthesis determined chemical composition of the films resulting in their enrichment with either chlorine or carbon, depending on the precursor composition. Practical implications: The optical quality of the films is good enough to suggest their applications in stack multilayer interference filters. The refractive index values of these films advocate their use as high refractive index materials while their low extinction coefficients assure the devices transparency. Originality/value: The work presents deposition rates as well as the films optical properties, chemical composition and morphology in relation to operational parameters of their synthesis. It also provides a comparison of these characteristics for two competitive precursor compounds. Finally, it presents the capability of PECVD method for the deposition of optical coatings onto polymer substrates.