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Evidences of the formation of a conductive Al film on AlN surface under UV excimer laser radiation.

Yaghdjian L., Nicolas G., Vacquier G., Autric M.

Inżynieria Materiałowa

1998

R. XIX, nr 4

1051-1056

Surface modifications of an AlN ceramic under an UV excimer laser irradiation have been investigated by SEM observations and EDS analysis, grazing-XRD and electrical resistance measurements. XRD have revealed the presence of an Al metallic film upon the laser impacted zone and SEM+EDS analysis have showed the formation of halo rich in oxygen around it. Electrical measurements have confirmed the metallic nature of the impacted surface, where a conductive path can be drawn upon the insulator AlN ceramic. Laser conditions have been determined regarding to the obtention of a metallic film by this one-step process.