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Investigations on the Acoustoelectric Effect in Surface Acoustic Wave Gas Sensors (Saw) with Bi-Layer Sensor Structures

Jakubik W.

Molecular and Quantum Acoustics

2005

Vol. 26

105-113

Bi-layer structures with two thicknesses of metal-free phthalocyanine ( ~120 and ~160 nm) but the same thickness of palladium (~20 nm), have been studied for hydrogen and carbon monoxide gas-sensing applications at ~30 °C and ~50 °C temperatures. The structures were fabricated in two different vacuum deposition processes (first the H2Pc film and followed by the Pd) onto a LiNbO3 Y-cut Zpropagating substrate for a SAW method. Additionally, using the same deposition techniques, the bi-layer structure was deposited onto a glass substrate with a planar microelectrode array for simultaneously monitoring of the planar resistance of the structure. A good correlation has been observed between these two methods; frequency changes for SAW method correlate with decreases of the bilayer structure resistance. These measurements can give information about the acousto-electric interactions between SAW and charge carriers in the bi-layer structure.