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Dynamic tilt testing of MEMS inclinometers based on conical motions

Yang Qihang, Cai Chenguang, Yang Ming, Kong Ming, Liu Zhihua, Liang Feng

Metrology and Measurement Systems

2023

Vol. 30, nr 1

31--47

The MEMS inclinometer integrates a tri-axis accelerometer and a tri-axis gyroscope to solve the perceived dynamic inclinations through a complex data fusion algorithm, which has been widely used in the fields of industrial, aerospace, and monitoring. In order to ensure the validity of the measurement results of MEMS inclinometers, it is necessary to determine their dynamic performance parameters. This study proposes a conical motion-based MEMS inclinometer dynamic testing method, and the motion includes the classical conical motion, the attitude conical motion, and the dual-frequency conical motion. Both the frequency response and drift angle of MEMS inclinometers can be determined. Experimental results show that the conical motions can accelerate the angle drift of MEMS inclinometers, which makes them suitable for dynamic testing of MEMS inclinometers. Additionally, the tilt sensitivity deviation of the MEMS inclinometer by the proposed method and the turntable-based method is less than 0.26 dB. We further provide the research for angle drift and provide discussion.