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Nano-porous alumina humidity sensors

Jasiński G., Jasiński P., Chachulski B.

Metrology and Measurement Systems

2008

Vol. 15, nr 2

195-204

In this paper the details of porous alumina humidity sensors fabricated using anodic aluminium oxidation are presented. The main aim of this study is to establish relations between technological process parameters and electrical properties of sensors. Surface morphology was investigated by scanning electron microscopy. Impedance spectroscopy was used to identify electrical parameters of the sensor.