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1 2008

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Evaluation of CMM for flatness measurements

Sidki H. M., Amer M.

Metrology and Measurement Systems

2008

Vol. 15, nr 4

585-593

Coordinate measuring machine (CMM) is a universal measuring instrument in dimensional metrology. However, the CMM has many sources of errors and deviations that affect its precision and accuracy. Unfortunately, the accuracy of flatness measurement by the CMM is not studied which is very important feature in metrology and industry at present time. A method is introduced to evaluate the accuracy of the flatness measurement of the Zeiss CMM based on flatness measurement of an optical flat. The flatnesses of the optical flat are measured by four different techniques using the CMM. Moreover, the effects of CMM head probe's scanning speed and step width on flatness measurements are examined separately in special measuring subroutines. The flatness of the optical flat surfaces are calibrated using Zygo phase shifting interferometer since it is used as reference for this study. The experimental results show that the CMM's probing points technique can be used for accurate measurements of flatness.