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1 Materials Science Poland

1 2005

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Thermal properties of multinuclear Ti(IV) and Zr(IV) carboxylate derivatives using thermal analysis and variable temperature MS and IR methods

Piszczek P., Grodzicki A., Richert M., Radtke A.

Materials Science Poland

2005

Vol. 23, No. 3

663--670

Studies of thermal properties of multinuclear Ti(IV) and Zr(IV) carboxylates of general formulas [Ti8O8(O2CBu)16] (1) and [Zr6O8(O2CBu)12] (2), which can be used as a potential source compounds, to produce TiO2 and ZrO2 thin layers, were carried out. Thermogravimetric methods (TG/DTG/DTA), mass spectrometry (MS-EI), and variable temperature infrared spectroscopy (VT-IR) have been used in order to determine the thermal decomposition pathway, identification of the volatile titanium and zirconium species in vapors, and determination their thermal stability. Moreover applications of Ti(IV) and Zr(IV) compounds in MOCVD experiments, as a potential metal oxide precursors, have been discussed.