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Influence of selected parameters of XeCl excimer laser system on characteristic of radiation pulses

Pokora L., Iwanejko L.

Journal of Technical Physics

1998

Vol. 39, no 1

77-89

We present the depedences of energy and duration of radiation pulses as well as efficiency of XeCl laser on selected parameters of the laser system such as: C2 capacitance, the separating inductance, L[s], the distance between electrodes in laser's chamber, d[k], and also the supply voltage, U[o], composition, and pressure of the active-medium mixture of gases. Results of numerical computations relate to a three-component mixture of gases, He-Xe-HCl, of the active medium of the excimer laser.